Advanced MEMS/NEMS Fabrication and Sensors

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Advanced MEMS/NEMS Fabrication and...

Advanced MEMS/NEMS Fabrication and Sensors

Name: Advanced MEMS/NEMS Fabrication and Sensors
ISBN: 9783030797485

Zhuoqing Yang

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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development.

Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors;
Covers a broad spectrum of sensor applications;
Written by leading experts in the field.

种类:

Technique - Electronics

年:

2021

出版社:

Springer

语言:

english

页:

318

ISBN 10:

3030797481