Understanding MEMS : principles and applications

The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise. Understanding MEMS: Principles and Applications provides a comprehensive introduction to this complex and multidisciplinary technology that is accessible to senior undergraduate and graduate students from a range of engineering and physical sciences backgrounds. Fully self-contained, this textbook is designed to help students grasp the key principles and operation of MEMS devices and to inspire advanced study or a career in this field. Moreover, with the increasing application areas, product categories and functionality of MEMS, industry professionals will also benefit from this consolidated overview, source of relevant equations and extensive solutions to problems. Key features: * Details the fundamentals of MEMS, enabling readers to understand the basic governing equations and know how they apply at the micron scale. * Strong pedagogical emphasis enabling students to understand the fundamentals of MEMS devices. * Self-contained study aid featuring problems and solutions. * Book companion website hosts Matlab and PSpice codes and viewgraphs